Abatement System(Scrubber)

Introduction

	Dry Scrubber	Heat & Wet Scrubber	Plasma & Wet Scrubber
Dimension (mm)	· Single : W 600 x D 600 x H 1,500 · Dual : W 1,500 x D 1,100 x H 1,800 · Large : W 1,200 x D 1,150 x H 2,000	· W 700 x D 750 x H 1,650	· W 1,000 x D 800 x H 1,600
Scrubbing Principle	Remove harmful gases at room temperature by chemical reaction between specific harmful gas and chemical absorbent without water or other heat sources.	Remove harmful gases at more 700℃ (heat by electric heater, indirect heat source) by thermal oxidation made by combination of flammable gas and air	Remove harmful gases at more 1,000℃ (generate plasma Arc using electric) by PFCs gas pyrolysis
Main Process	ETCH	CVD	IMPLANT & CVD & ETCH
Capacity	· 100slm · 200slm	· 500slm · 1500slm · 2000slm	3· 00slm · 500slm
Scrubber concept
Available Gases	AsH3, PH3, Cl2, BCl3, CF4, SF6, HBr, CHF3, SiH4, WF6, TiCl4, PH3, HF, HCl, F2, NH3, TMA, TEMAZr, …	SiH4, NH3, NF3, PH₃, TEOS, H₂, DCS, …	CF4, CHF3, HBr, Cl2, SF6, BCl3, N2, NF3, S2F6, C3F8, …

DRE(%) Performance

Heat & Wet Scrubber				Plasma & Wet Scrubber
Gas (LPM)		N2 (LPM)	Efficiency (%)	Gas (LPM)		N2 (LPM)	Efficiency (%)
SiH4	0.5	200	99.9	NF3	5	50	99.7
	1	200	99.9		5	100	99.6
	1.5	200	99.9		5	150	99.6
	0.5	300	99.9	CF4	0.1	100	99.0
	1	300	99.9		0.5	100	81.0
	1.5	300	99.9		1	100	57.0
NF3	0.5	200	91	SF6	1	50	94.5
	1	200	92.5		1	100	97.0
	1.5	200	93.8		1	150	86.4

Qualified System manufacturer

Each system has supplied 100+ q’ty to global customers indirectly