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EQUIPMENT_GDS(GSS)

Gas Delivery System

BSGS, Gas Cabinet, Gas Panel, VMB, VMP

Gas Cabinet VMB
Dimension
(mm)		 · 1 bottle : W 500 x D 550 x H 2,000
· 2 bottle : W 800 x D 550 x H 2,000
· 3 bottle : W 1200 x D 550 x H 2,000		 · W 1,000 x D 550 x H 2,000
PLC · Omron · Omron
Operation
method		 · Manual
· Semi Auto
· Full Auto		 · Manual
· Semi Auto
· Full Auto
Number of
Supply/Process		 · 1 supply x 2 process
· 2 supply x 2 process		 · 1 supply x 4 process
· 1 supply x 8 process
· 2 supply x 8 process
Features & Options · SCADA Communication
· Purge/Vent
· UVIR
· Heater/Chiller
· Sprinkler		 · SCADA Communication
· Purge/Vent
· UVIR
· Heater/Chiller
· Sprinkler
Qualification · Complying to SEMI standard
· Complying to CE		 · Complying to SEMI standard
· Complying to CE